DC Sputtering Power Supplies

CPI CMP's 36 kW Compact Series power supplies provide integral active arc suppression, while the Gen 1 Replacement and Gen 2.5 series products can achieve the same successful arc suppression performance using the optional external arc suppression devices.

CPI CMP's high-power compact series, world leaders in the high-power class, include built-in active arc suppression. Various output voltages and currents are available.

The highly reliable Gen 2.5 family of air-cooled power supplies experiences better than 350,000 hours MTBF. These products are available in power levels ranging from 6 kW to 24 kW.

To continue to support the installed based of CPI CMP water-cooled power supplies (Gen 1), CPI CMP has developed an air-cooled replacement series based on its proven Gen 2.5 technology that is pin-for-pin compatible.

Power Supplies
Model Number Product Line Input Voltage Output Power Output Voltage/Current
VPW2870B5 Gen 1 Replacement 200 / 208 VAC 12 kW, 6 kW, 2.5 kW 900 V / 25 A
Gen 2.5 Series 200 / 208 VAC 6 kW, 2.5 kW, 600 W 1000 V / 10 A
Gen 2.5 Series 200 / 208 VAC 12 kW, 6 kW, 3 kW 900 V / 25 A
Gen 1 Replacement 200 / 208 VAC 6 kW, 2.5 kW, 250 W 1000 V / 10 A
Gen 2.5 Series 200 / 208 VAC 24 kW, 12 kW, 6 kW 900 V / 50 A
VPW2870B4 Gen 1 Replacement 460 / 480 VAC 12 kW, 6 kW, 2.5 kW 900 V / 25 A
High-power Compact Series 460 / 480 VAC 36 kW 550 V / 120 A
Gen 1 Replacement 460 / 480 VAC 6 kW, 2.5 kW, 250 W 1000 V / 10 A
High-power Compact Series 460 / 480 VAC 36 kW 575 V / 120 A
All product data sheets are in PDF format. To read and print PDF files, download Adobe Acrobat Reader