Industrial - Semi-Conductor Wafer Fab
Model Number Emitter Cooling Eb,kV Ib,A Po (kW)
6696 Thoriated Water 16 11 80
6696A Thoriated Water 15 7 80
RS3060CJ Thoriated Water 14 21.1 100
YU191A Thoriated Water 4.9 2.2 7.5
YU191B Thoriated Water 4.9 2.2 7.5
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